Siddharta Panda : Publications  

Complete List of Publications

  1. S.E. Pratsinis, G. Wang, S. Panda, T.Guiton, A.W. Weimer, "Aerosol Synthesis of AlN by Nitridation of Aluminum Vapor and Clusters", J. Mat. Res., 10, 512 (1995).
  2. S. Panda, S.E. Pratsinis, "Modeling the Synthesis of Aluminum Particles by Evaporation - Condensation in an Aerosol Reactor", Nanostructured Materials, 5, 755 (1995).
  3. L. Gradon, S.E. Pratsinis, A. Podgorski, S.J. Scott, S. Panda, "Retention of Inhaled Particles in Rat Lungs Including Toxic and Overloading Effects", J. Aerosol Sci., 27, 487 (1996).
  4. S. Panda, J.S. Kim, B.H. Weiller, D.J. Economou, D.M. Hoffman, "Low Temperature Chemical Vapor Deposition of Titanium Nitride Films from Tetrakis(ethylmethylamido)titanium and Ammonia", Thin Solid Films, 357, 125 (1999).
  5. S. Panda, D.J. Economou, M. Meyyappan, "Effect of metastable oxygen molecules in high density power-modulated oxygen discharges", J. Appl. Phys., 87, 8323 (2000).
  6. S. Panda, D.J. Economou, L. Chen, "Anisotropic etching of polymer films by high Energy (~100s of eV) oxygen atom neutral beams", J. Vac. Sci. Technol. A, 19, 398 (2001).
  7. R. Wise, S. Panda, S. Mathad, R. Ranade, "Observations of Pattern-Dependent Plasma Charging and Polymer Deposition During Deep Trench Dry Etch", Future Fab International, 249, 11 (2001).
  8. S. Panda, R. Wise, "Etch Characteristics and Challenges of Silicon Deep Trench Module", Business Briefing: Global Semiconductor Manufacturing Technology, 2003, 32 (2003).
  9. S. Panda, R. Ranade, G.S. Mathad, "Etching High Aspect Ratio Silicon Trenches", J. Electrochem. Soc., 150, G612 (2003).
  10. S. Panda, R. Wise, A. Mosden, K. Sugiyama, J. Camilleri, "Effect of Rare Gas Addition on Deep Trench Silicon Etch", Microelectronic Engr., 75, 275 (2004).
  11. H.S. Yang et al. (with S. Panda), "Dual stress liner for high performance sub-45nm gate length SOI CMOS manufacturing", IEDM Tech. Digest, 1075 (2004).
  12. S. Panda, R. Wise, A. Mahorowala, V. Balasubramanian, K. Sugiyama, "Etching Silicon-containing Bilayer Resists in Ammonia-based Plasmas", J. Vac. Sci. Technol. B, 23, 900 (2005).
  13. Q. Ouyang, M.Ieong, M. Fischetti, S. Panda, D. Boyd, K. Rim, J.A. Ott, "Characteristics of High Performace PFETs with Embedded SiGe Source/Drain and <100> Channels on 45' Rotated Wafers", VLSI-TSA Tech. Digest, 27 (2005).
  14. C.D. Sheraw, M. Yang, D.M. Fried, G. Costrini, T. Kanarsky, W.-H. Lee, V. Chan, M.V. Fischetti, J. Holt, L. Black, M. Naeem, S. Panda, L. Economikos, J. Groschopf, A. Kapur, Y. Li, R. T. Mo, A. Bonnoit, D. Degraw, S. Luning, D. Chidambarrao, X. Wang, A. Bryant, D. Brown, C.-Y. Sung, P. Agnello, M. Ieong, S.-F. Huang, X. Chen, M. Khare, "Dual Stress Liner Enhancement in Hybrid Orientation Technology", VLSI Tech. Digest, 12 (2005).
  15. Q. Ouyang, M. Yang, J. Holt, S. Panda, H. Chen, H. Utomo, M. Fischetti, N. Rovedo, J. Li, N. Klymko, H. Wildman, T. Kanarsky, G. Costrini, D.M. Fried, A. Bryant, J.A. Ott, M. Ieong, C.-Y. Sung, "Investigation of CMOS Devices with Embedded SiGe Source/Drain on Hybrid Orientation Substrates", VLSI Tech. Digest, 28 (2005).
  16. E. Leobandung et al. (with S. Panda), "High Performance 65 nm SOI Technology with Dual Stress Liner and Low Capacitance SRAM cell", VLSI Tech. Digest, 128 (2005).
  17. W.-H. Lee et al. (with S. Panda), "High Performance 65 nm SOI Technology with Enhanced Transistor Strain and Advanced-Low-K BEOL", IEDM Tech. Digest, 61 (2005).
  18. Z. Luo, Y. Chong, J. Kim, B. Greene, S. Panda, T. Sato, J. Holt, D. Chidambarrao, J. Li, R. Davis, A. Madan, A. Turansky, O. Gluschenkov, R. Lindsay, A. Ajmera, J. Lee, S. Mishra, R. Amos, D. Schepis, H. Ng, and K. Rim, "Design of High Performance PFETs with Strained Si Channel and Laser Anneal", IEDM Tech. Digest, 495 (2005).
  19. M. Horstmann et al. (with S. Panda), "Integration and Optimization of Embedded- SiGe, Compressive and Tensile Liner Films, and Stress Memorization in Advanced SOI CMOS Technlogies", IEDM Tech. Digest, 243 (2005).
  20. P. Bhatnagar, S. Panda, N. Edleman, S. Allen, R. Wise, A. Mahorowala, "Integrated Non-SO2 Underlayer and Improved Line-Edge-Roughness Dielectric Etch Process using 193 nm Bilayer Resist", Appl. Phys. Lett., 88, 231501 (2006).
  21. C. Ouyang et al. (with S. Panda), "Systematic Characterization of Pseudomorphic (110) Intrinsic SiGe Epitaxial Films for Hybrid Orientation Technology with Embedded SiGe Source/Drain", in Transistor Scaling -- Methods, Materials and Modeling, S. Thompson, F. Nouri, W. Tsai, W-C. Lee (Eds.), Mater. Res. Soc. Symp. Proc., 913 (2006).
  22. X. Chen et al. (with S. Panda), "Stress Proximity Technique for Performance Improvement with Dual Stressed Liner at 45nm Technology and Beyond", VLSI Tech. Digest, 60 (2006).
  23. P. Bhatnagar, S. Panda, N. Edleman, S. Allen, R. Wise, A. Mahorowala, "Controlling line-edge roughness and reactive ion etch lag in sub-150 nm features in borophosphosilicate glass", J. Appl. Phys., 101, 076102 (2007).
  24. N. Rathor, S. Panda, “Aminosilane densities in nanotextured silicon”, Mat. Sci. Eng. C, 29, 2340 (2009).
  25. S. Kumar, R. Ch, D. Rath, S. Panda, “Densities and orientations of antibodies on nano-textured silicon surfaces”, Mat. Sci. Eng. C, 31, 370 (2011).
  26. S. Dastidar, R. Chahar, V. Bal, S. Kumar, S. Panda, “Fabrication of meso and nanotextured silica surfaces for tunable densities of functionalized molecules”,Colloids and Surfaces A: Physicochemical and Engineering Aspects , 412, 38 (2012).
  27. D. Rath, S. Kumar, S. Panda, “Enhancement of Antigen-Antibody Kinetics on Nanotextured Silicon Surfaces in Mixed Non-flow Systems”, Mat. Sci. Eng. C , 32, 2223 (2012).
  28. S. Kumar, S. Panda, “Correlation of kinetics and conformations of free and immobilized enzymes on non- and nano textured silicon biosensor surfaces”, ,BioNanoScience , 2,171 (2012).
  29. H.A. Ahmad, D. Nayak, S. Panda, “Temperature sensitivities of doped polyaniline nanoscale films on flexible substrates”, J. App. Polym. Sci., 129, 230 (2013).
  30. R. Chepyala, S. Panda, “Tunable surface free energies of functionalized molecularlayers on Si surfaces for microfluidic immunosensor applications”,App. Surf. Sci., 271, 77(2013).
  31. R. Chepyala, S. Panda, “Flow characteristics of polar liquids in microfluidic immunosensors”, J. Microfluidics Nanofluidics, 16 ,729 (2014).
  32.  D. Rath, S. Panda, “Enhanced capture efficiencies of antigens in immunosensors”, Chem. Eng. J., 260, 657 (2015).
  33. R. Chepyala, S. Panda, “Zeta potential and Reynolds number correlations for electrolytic solutions in microfluidic immunosensors”, J. Microfluidics Nanofluidics, DOI 10.1007/s10404-014-1532-6 (2015).
  34.  S. Dastidar, A. Agarwal, N. Kumar, V. Bal, S. Panda, “Sensitivity enhancement of Electrolyte-Insulator-Semiconductor sensors using meso- and nanotextured dielectric surfaces”, IEEE Sensors J., 15, 2039 (2015).
  35. N. Kumar, J. Kumar, S. Panda, “Sensitivity enhancement mechanisms in textured dielectric based electrolyte-insulator-semiconductor (EIS) sensors",ECS J Solid State Sci. Tech. 4, N18 (2015).
  36. N. Kumar, J. Kumar, S. Panda, “Low temperature annealed amorphous indium gallium zinc oxide (a-IGZO) as a pH sensitive layer for applications in field effect based sensors”, AIP Advances, 5, 067123 (2015).
  37. M. Sinha and S. Panda, "Effects of thickness, dopant type and doping levels of flexible nanoscale polyaniline films on responses to gases", Mater. Res. Express, 2, 076401 (2015).
  38. N. Kumar, A.P. Tiwari, J. Kumar, S. Panda, �Effect of post deposition annealing temperature of e-beam evaporated Ta2O5 films on sensitivities of electrolyte-insulator- semiconductor devices�, 2nd International Symposium on Physics and Technology of Sensors (ISPTS), 214, 2015 (Publ. IEEE)
  39. D. Rath, S. Panda, �Contribution of rotational diffusivity towards the transport of antigens in heterogeneous immunosensors�, Analyst, 140, 6579 (2015).
  40. S. Senapati, S. Panda, �Effect of Aging of V2O5 Sol on Properties of Nanoscale Films�, Thin Solid Films, 599, 42 (2016).
  41. D. Rath, S. Panda, �Correlation of capture efficiency with the geometry, transport and reaction parameters in heterogeneous immunosensors�, Langmuir, 32, 1410 (2016).
  42. S. Kumar, N. Kumar, S. Panda, �"Signal amplification in field effect based sandwich enzyme linked immunosensing by tuned buffer concentration with ionic strength adjuster�, Appl. Biochem. Biotechnol., DOI 10.1007/s12010-016-1986-y (2016).
  43. N. Kumar, J. Kumar, S. Panda, �Enhanced pH sensitivity over the Nernst limit of electrolyte gated a-IGZO thin film transistor using branched polyethylenimine�, RSC Adv., 6, 10810 (2016).
  44. N. Kumar, J. Kumar, S. Panda, �Back channel electrolyte gated a-IGZO dual gate thin film transistor for enhancement of pH sensitivity over Nernst limit�, Elect. Dev. Lett, 37, 500 (2016).
  45. N. Kumar, S. Senapati, S. Kumar, J. Kumar, S. Panda, �Functionalized vertically aligned ZnO nanorods for application in electrolyte-insulator-semiconductor based pH sensors and label-free immuno-sensors�, Journal of Physics: Conference Series 704, 012013, 2016 (Publ. IOP).
  46. N. Kumar, M. Sutradhar, J. Kumar, S. Panda, �Role of deposition and annealing of the top gate dielectric in a-IGZO TFT-based dual-gate ion-sensitive field-effect transistors�, Semicond. Sci. Technol., 32, 035013 (2017).
  47. N. Kumar, S. Kumar, J. Kumar, S. Panda, �Investigation of Mechanisms Involved in the Enhanced Label Free Detection of Prostate Cancer Biomarkers Using Field Effect Devices�, J. Electrochem. Soc., 164, B409 (2017).
  48. A. Mukherjee, N. Sekar, S. Panda, �Influence of the Acid - Base Component of Surface Energy on Optical Properties of Immobilized Dyes�, Ind. Eng. Chem. Res., 56, 13543 (2017).
  49. Prabha Verma, Siddhartha Panda, �Polymer selection approaches for designing electronic noses: A comparative study�, Sens. Act. B Chemical 273, 365 (2018).
  50. Malay Kumar Rana, Mousumi Sinha, Siddhartha Panda, �Gas sensing behavior of metal-phthalocyanines: Effects of electronic structure on sensitivity�, Chemical Physics, 513, 23 (2018).
  51. Kusumita Dutta, Siddhartha Panda, �Identification of the Levels of Interference of Ions toward Heavy Metal Detection in Electrochemical Sensors Using the Barrier Width Technique�, J. Electrochem. Soc., 165, B378 (2018).
  52. K. Dutta, S. Panda, "Interference Analysis for Electrochemical Heavy Metal Ion Sensors in Terms of Stripping Current, Barrier Width and Adsorption", J. Electrochem. Soc., 165, B644 (2018).
  53. D. Rath, S. Kumar, S. Panda, "pH-Based Detection of Target Analytes in Diluted Serum Samples Using Surface Plasmon Resonance Immunosensor", Appl.Biochem. Biotechnol., 187, 1272 (2019).
  54. D. Rath, S. Panda, "Modeling the transport and capture of analytes in a two-phase heterogeneous microfluidic immunosensor", Chem. Eng. Res. Des., 141, 272 (2019).
  55. A Mukherjee, K.G. Thorat, N. Sekar, S. Panda, "Change in spectral properties of dyes upon immobilization on silicon surfaces: a combined theoretical and experimental study", SN Applied Sciences, 1 (7), 678 (2019).
  56. D. Bhatt, N. Kumar, S.Panda, "Stacked top gate dielectrics in dual gate ion sensitive field effect transistors: role of interfaces", ACS Applied Electronic Materials, 1, 1465 (2019).
  57. K. Dutta, S. Panda, "Thermodynamic and Charge Transport Studies for the Detection of Heavy Metal Ions in Electrochemical Sensors Using a Composite Film of Aniline, N-phenylglycine and Graphene Oxide", J.Electrochem. Soc., 166, B1335 (2019).
  58. S. Verma, S. Panda, “Correlations of the capture efficiency with the Dean number and its constituents in heterogeneous microfluidic immunosensors”, Microfluidics Nanofluidics, DOI: 10.1007/s10404-019-2312-0. (2020)
  59. D. Bhatt, S. Kumar, S. Panda, “Amorphous IGZO field effect transistor based flexible chemical and biosensors for label free detection", Flex. Printed. Electronics, (2020).
  60. M. Sinha, P. Verma, S. Panda, “Metal-phthalocyanine modified doped polyaniline for VOC sensing applications”, Flex. Printed. Electronics, (2020).