Working Principles

The FIB model D97NOVA 6000 combines the Scanning Electron Beam (SEM) and the Focused Ion Beam (FIB) in order to achieve analysis at nano-scale resolution. The instrument is equipped with different detectors, GIS systems and micromanipulator which make it ideal for to perform high-resolution imaging, nano-patterning, material deposition, milling, TEM lamella preparation etc.

Capabilities :
1. TEM lamella preparation
2. Site specific Cross sectional imaging , 3D Slice and View
3. Precision machining for micro tools
4. HR imaging, Low kV HR imaging , SEM/STEM imaging , Ion beam imaging
5. Nano-fabrication and Nano-patterning

 FIB Charges (Excluding GST) 
***This is an introductory price. The charges may be reviewed at yearly.

Operation

IITK

OUTSITE USER

SEM ( 2 Hours)

1500/-

2000/-

Milling (3 hours)

2000/-

3000/-

**  FIB Patterning requires a minimum 3 hours.

Information

  • Faculty Incharge: Sudeep Bhattacharjee
  • Lab Incharge: Mr. Jagtap P Bhimrao

Instrument Details

Make: ThermoFISHER Model: Model -D97NOVA 6000
 Electron Beam Column Specification:
Electron Source :
Thermal Schottky Field-emitter.Accelerating
Voltage: Up to 30kV
Continuously variable Probe current:
 Continuously variable in the range of :
0.8   pA – 100nA
Electron Beam Resolution:
10nm @ 30 kV (STEM Mode)
10 nm @ 1 kV
10 nm @ 15 kV
FIB Column Specification:
Accelerating Voltage:
Up to 30 kV,
 continuously variableIon Gun:
Gallium liquid metal ion source
Available.Probe current:
It covers the range from 1 pA to 65 nA or larger.Imaging Resolution: 10 nm @ 30 kV

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